Wafer Cassette Changer PCT2022

Treated material
1.Dicing frame
Size200mm・300mm
Thickness1.22 ± 0.08mm
Warp0.25mm or less
Contactable rangeBack side
2.Career
Standard cassetteCassette with 6 sheets・Cassette with 13 sheets
Frame storage pitch15mm
3.Throughput
Takt time・Transportation time180 seconds/13 sheets or less

This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.

The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.

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ALWAYS GOES BEYOND CUSTOMERS' EXPECTATIONS

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