- For 2"~12" wafer handling
SINGLE ARM AR-S300H For handling heavy substrate AR-S300W Water-proof AR-S300R Reversal-axis (翻面功能) DOUBLE ARM AR-W300H For handling heavy substrate AR-W300W Water-proof AR-W300COMPO Controller built-in robot AR-W300S With cassette mapper - 日本原厂依客户需求可客制FORK,进而向下支援2" Wafer , 范围可达2" ~ 12"
- 全系列Robot为伺服驱动器马达,重覆精度可达±0.1mm
- 简单易操控的人机介面教导器,迅速故障排除与Teaching取放点位
- 如需进一步的了解随时欢迎您与我们询问联络
永远超越客户的期待
ALWAYS GOES BEYOND CUSTOMERS' EXPECTATIONS