Silicon Wafer Thickness Sensor

产品描述:

features

The SIT-200 uses a high-speed swept tunable laser, as opposed to a broadband source, to probe the wafer under test. This enables higher-power measurement per wavelength, leading to high dynamic range. As a result, thickness measurements can be performed even on un-polished wafers, for example during/after wet-etching.

  • All-Optical, non-contact thickness sensor for silicon wafers
  • High dynamic range capable of measuring disordered surfaces
  • Capable of in-situ measurement during wet-etching

applications

  • Silicon Wafer Thickness Measurement

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